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MDX DC 1 kW & 1.5 kW Series

MDX DC 1 kW & 1.5 kW Series
MDX DC 1 kW & 1.5 kW Series

Tight regulation, superior arc quenching, and low stored output energy make MDX Series DC power supplies an industry leader. Intended for continuous hard use in a vacuum environment, these rugged power supplies are most commonly used as DC magnetron sputtering drives. They also offer tight regulation as bias supplies in RF sputtering and etching systems. Their compact design makes them the primary choice for laboratory systems
Model: MDX DC
Nhà sản xuất: Advancedenergy

Features

Advanced Energy® switchmode

conversion modules provide over 90%

efficiency from line to load. The highfrequency method used gives a 20 msec response to plasma load changes. The design reduces the stored energy at the output by several orders of magnitude. Line-induced surges and noise spikes are virtually eliminated

These features give an added

advantage when developing

methods for sputtering hard-to deposit materials at high rates:

Very low ripple

Adjustable arc suppression time

Specifications 

Electrical  MDX 1 kW  MDX 1.5 kW
Regulation  0,20%
Ripple  5% at 50 kHz
Ramp Timer  1 to 10 sec or 1 to 10 min
Load Mismatch  Continuous operation into any load mismatch. Automatic limiting occurs when current,
voltage, or power exceeds preset limits.
Power Output  1000 W  1500 W
Output Voltage  1000 V, 1300 V  500 V, 750 V
Ignition Voltage  1500 V  800 V, 1200 V
Input Power  115 VAC, 50/60 Hz ±10%, 16 A max
208/220 VAC, 50/60 Hz ±10%, 8.9 A
208/220 VAC, 50/60 Hz ±10%, 13.4 A
Power Factor  0,6  

 

Electrical  MDX 1 kW  MDX 1.5 kW
Regulation  0,20%
Ripple  5% at 50 kHz
Ramp Timer  1 to 10 sec or 1 to 10 min
Load Mismatch  Continuous operation into any load mismatch. Automatic limiting occurs when current,
voltage, or power exceeds preset limits.
Power Output  1000 W  1500 W
Output Voltage  1000 V, 1300 V  500 V, 750 V
Ignition Voltage  1500 V  800 V, 1200 V
Input Power  115 VAC, 50/60 Hz ±10%, 16 A max
208/220 VAC, 50/60 Hz ±10%, 8.9 A
208/220 VAC, 50/60 Hz ±10%, 13.4 A
Power Factor  0,6  



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