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RF Generators and Power-Delivery Systems

RF Generators and Power-Delivery Systems
RF Generators and Power-Delivery Systems
RF Generators and Power-Delivery Systems
RF Generators and Power-Delivery Systems
RF Generators and Power-Delivery Systems
RF Generators and Power-Delivery Systems
RF Generators and Power-Delivery Systems
RF Generators and Power-Delivery Systems

The versatile Apex® family of RF generators provides remarkably high power density and power-delivery consistency. Sophisticated RF conversion technology not only offers enhanced product and process reliability but also increases cost effectiveness by eliminating the need for front-end, DC-to-DC conversion components. Exceptionally fast and sensitive arc-handling technology also increases yield and lowers CoO. For superb performance in plasma-based, thin-film processes for semiconductor, flat panel display, or data storage manufacturing, the Apex platform is the ideal choice. With its unique, modular design—in a package so trim it can be mounted directly on the chamber—the Apex platform is also highly customizable to suit your specific process needs.
Model: 13.56 MHz
Nhà sản xuất: Advanced-Energy

Features

- Streamlined design

- On-board chamber mount, on-tool frame mount, rack mount and shoebox options

- Wideband control loops and optional, high-repetition-rate pulsing

- Industry-leading arc management

- Regulatory compliant.

Benefits

- Higher power density

- Improved process flexibility

- Increased yield

- Lower CoO

- Simplified process tool intergration

- Flexible communications

General Specifications

- Dimensions (Including Rear Connections):

    1.5Kw,3Kw,5.5Kw: 132.59 mm (H) x 215.14 mm (W) x 425.96 mm (D) 5.22"     (H) x 8.47" (W) x 16.77" (D).

    10Kw: 133.35 mm (H) x 482.6 mm (W) x 601.29 mm (D); 5.25" (H) x 19 (W)     x 23.67" (D) 3U 19" rack.

- Frequency:  13.56 MHz

- Harmonics: All full-rated output, -40 dBc forward/load when operated into a 50 Ω non-reactive load.

Output Accuracy:

+ Forward Power Regulation: ±1% of set point or ±0.1% full-rated output power, whichever is greater, when measured into a 50 Ω non-reactive impedance.

+ Load Power Regulation: ±3% of the load power into a 3:1 VSWR non-reactive load

-          Ambient Operating Temperature: 5°C (41°F) min, 40°C (104°F) max

-          Water Coolant Temperature: 35°C (95°F) max

Applications

Typical Market Applications: Semiconductors, Flat panel displays, Data storage devices, Solar cells


Doawload catalogue:  RF Generators and Power-Delivery Systems

Condition: Availibale

Contact to have the best cost: +84(0) 83 833 1313

General Specifications

- Dimensions (Including Rear Connections):

    1.5Kw,3Kw,5.5Kw: 132.59 mm (H) x 215.14 mm (W) x 425.96 mm (D) 5.22"     (H) x 8.47" (W) x 16.77" (D).

    10Kw: 133.35 mm (H) x 482.6 mm (W) x 601.29 mm (D); 5.25" (H) x 19 (W)     x 23.67" (D) 3U 19" rack.

- Frequency:  13.56 MHz

- Harmonics: All full-rated output, -40 dBc forward/load when operated into a 50 Ω non-reactive load.

Output Accuracy:

+ Forward Power Regulation: ±1% of set point or ±0.1% full-rated output power, whichever is greater, when measured into a 50 Ω non-reactive impedance.

+ Load Power Regulation: ±3% of the load power into a 3:1 VSWR non-reactive load

-          Ambient Operating Temperature: 5°C (41°F) min, 40°C (104°F) max

-          Water Coolant Temperature: 35°C (95°F) max

Applications

Typical Market Applications: Semiconductors, Flat panel displays, Data storage devices, Solar cells

Benefits

- Higher power density

- Improved process flexibility

- Increased yield

- Lower CoO

- Simplified process tool intergration

- Flexible communications

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