Email liên hệ:

info@systech.vn

Hỗ trợ dịch vụ:

+84(0) 83 383 1313

NAVIO DIGITAL MATCHING NETWORK

NAVIO DIGITAL MATCHING NETWORK
NAVIO DIGITAL MATCHING NETWORK

Economical, Configurable Matching Network Solution Experience simplicity and high reliability in a single, affordable package. The NavioTM matching network leverages Advanced Energy’s power expertise to precisely match complex plasma impedance to your tuning range. It’s quick, accurate, and repeatable. Available in multiple power ranges and frequencies, choose from a standard offering or a configurable design. Installation is virtually plug-and-play with Advanced Energy’s RF power supplies. Virtual front panel software is available for monitoring. The compact, air-cooled unit — available in a standard package or a slim version — offers extreme flexibility with pre-engineered configurability to support most thin-film applications.
Model: DIGITAL MATCHING NETWORK
Nhà sản xuất: Advancedenergy

Product Highlights Market Application

 Improve throughput, increase yield, and reduce

production costs

 Quick, accurate, and repeatable impedance matching

 Optimized, off-the-shelf functionality for many applications

 Generous menu of configuration options for more

sophisticated processes

 Wide power and frequency ranges

 Virtual Front Panel (VFP) software for real-time

process power and impedance measurement

and analysis

 Solar PV

 Industrial

 Flat panel display

 MEMS manufacturing

Capacitively and Inductively Coupled

Plasma Process Applications

 PECVD

 Etch/clean

 PVD

Product Specifications 

Physical Specifications  Standard  Flat Pack
Dimensions  15.0 cm (H) x 24.5 cm (W) x 37.4 cm (D)  11.2 cm (H) x 30.0 cm (W) x 39.4 cm (D)
5.9" (H) x 9.6" (W) x 14.7" (D)  4.4" (H) x 11.8" (W) x 15.5" (D)
Weight  6.6 kg (14.5 lb)  7.1 kg (15.6 lb)
Mounting  Mounting holes on bottom, rear, and sides of unit  

 

Physical Specifications  Standard  Flat Pack
Dimensions  15.0 cm (H) x 24.5 cm (W) x 37.4 cm (D)  11.2 cm (H) x 30.0 cm (W) x 39.4 cm (D)
5.9" (H) x 9.6" (W) x 14.7" (D)  4.4" (H) x 11.8" (W) x 15.5" (D)
Weight  6.6 kg (14.5 lb)  7.1 kg (15.6 lb)
Mounting  Mounting holes on bottom, rear, and sides of unit  



0833831313