Email liên hệ:

info@systech.vn

Hỗ trợ dịch vụ:

+84(0) 83 383 1313

CESAR RF POWER SUPPLIES

CESAR RF POWER SUPPLIES
CESAR RF POWER SUPPLIES
CESAR RF POWER SUPPLIES
CESAR RF POWER SUPPLIES

The robust and versatile Cesar® platform offers exceptionally consistent RF power-delivery performance, as well as a diverse selection of models, each with a unique set of features and capabilities (2, 4, 13.56, 27.12, and 40.68 MHz; 0.3 to 5 kW; with a variety of user interfaces and input options). This enables you to choose a unit suited specifically to your application — without lengthy custom-generator lead times.
Model: Cesar RF
Nhà sản xuất: Advanced Energy

Features

-       Increased process uptime

-       Enhanced operational ease and flexibility

-       Customized performance without custom-unit lead times

-       Long-term ease of use and cost savings

-       World-class service and support

-       Compact, streamlined design

-       Standard platform packaging

-       High efficiency — less heat generated

-       Two analog user port options

-       SEMI compliance (meets or exceeds standards)

Benefits

Increased Process Uptime, High Product Reliability

Increased Process Uptime, High Product Reliability

Dependable Performance

Enhanced Operational Ease and Flexibility

Customized Performance Without Custom-Unit Lead Times

Long-Term Ease of Use and Cost Savings

Standard, Interchangeable Package Design

Reduced Training Costs

Rugged, Economical Design

World-Class Service and Support

 

Applications

- Cesar RF power supplies offer customized performance for most any plasma-based application, including:

+ HDP-CVD

+ PECVD

+ Etch — ICP/RIE

+ PVD

+ Plasma cleaning

General Specifications

Model

Frequency

RF Power

AC Mains

Dimensions

Cooling

Water Fitting

026

 

600 W

230 V (187 to 253 V)

483 mm (W) x 500 mm (D) x 88 mm (H)

Air

N/A

0210

 

1000 W

19" (W) x' 19.7" (D) x 3.5" (H)

0220, 200 V

 

2000 W

3 x 200 V (180 to 230 V)

 

 

 

0220, 400 V

 

3 x 400 V (360 to 440 V)

 

 

 

0225, 200 V

2.000 MHz

2500 W

3 x 200 V (180 to 230 V)

 

 

 

0225, 400 V

3 x 400 V (360 to 440 V)

483 mm (W) x 552 mm (D) x 132 mm (H)

Water

For water tubing 10 mm O.D., 8 mm I.D.

0230, 200 V

 

3000 W

3 x 200 V (180 to 230 V)

19" (W) x' 21.7" (D) x 5.2" (H)

0230, 400 V

 

3 x 400 V (360 to 440 V)

 

 

0250, 200 V

 

5000 W

3 x 200 V (180 to 230 V)

 

 

 

0250, 400 V

 

3 x 400 V (360 to 440 V)

 

 

 

046

 

600 W

230 V (187 to 253 V)

483 mm (W) x 500 mm (D) x 88 mm (H)

Air

N/A

0410

 

1000 W

19" (W) x' 19.7" (D) x 3.5" (H)

0420, 200 V

 

2000 W

3 x 200 V (180 to 230 V)

 

 

 

0420, 400 V

 

3 x 400 V (360 to 440 V)

 

 

 

0425, 200 V

4.000 MHz

2500 W

3 x 200 V (180 to 230 V)

 

 

 

0425, 400 V

3 x 400 V (360 to 440 V)

483 mm (W) x 552 mm (D) x 132 mm (H)

Water

For water tubing 10 mm O.D., 8 mm I.D.

0430, 200 V

 

3000 W

3 x 200 V (180 to 230 V)

19" (W) x' 21.7" (D) x 5.2" (H)

0430, 400 V

 

3 x 400 V (360 to 440 V)

 

 

0450, 200 V

 

5000 W

3 x 200 V (180 to 230 V)

 

 

 

0450, 400 V

 

3 x 400 V (360 to 440 V)

 

 

 

133

 

300 W

 

 

 

 

136

 

600 W

230 V (187 to 253 V)

483 mm (W) x 500 mm (D) x 88 mm (H)

19" (W) x' 19.7" (D) x 3.5" (H)

Air

N/A

1310

 

1000 W

 

 

1312

 

1200 W

 

 

 

 

1320, 200 V

 

2000 W

3 x 200 V (180 to 230 V)

 

 

 

1320, 400 V

13.560

MHz

3 x 400 V (360 to 440 V)

 

 

 

1325, 200 V

2500 W

3 x 200 V (180 to 230 V)

 

 

 

1325, 400 V

 

3 x 400 V (360 to 440 V)

483 mm (W) x 552 mm (D) x 132 mm (H)

Water

For water tubing 10 mm O.D., 8 mm I.D.

1330, 200 V

 

3000 W

3 x 200 V (180 to 230 V)

19" (W) x' 21.7" (D) x 5.2" (H)

1330, 400 V

 

3 x 400 V (360 to 440 V)

 

 

1350, 200 V

 

5000 W

3 x 200 V (180 to 230 V)

 

 

 

1350, 400 V

 

3 x 400 V (360 to 440 V)

 

 

 

273

 

300 W

 

483 mm (W) x 500 mm (D) x 88 mm (H)

19" (W) x' 19.7" (D) x 3.5" (H)

 

 

276

 

600 W

230 V (187 to 253 V)

Air

N/A

2710

27.120

MHz

1000 W

 

 

 

2720, 200 V

2000 W

3 x 200 V (180 to 230 V)

 

 

 

2720, 400 V

3 x 400 V (360 to 440 V)

483 mm (W) x 552 mm (D) x 132 mm (H)

Water

For water tubing 10 mm O.D., 8 mm I.D.

2740, 200 V

 

4000 W

3 x 200 V (180 to 230 V)

19" (W) x' 21.7" (D) x 5.2" (H)

2740, 400 V

 

3 x 400 V (360 to 440 V)

 

 

403

 

300 W

 

483 mm (W) x 500 mm (D) x 88 mm (H)

19" (W) x' 19.7" (D) x 3.5" (H)

 

 

405

 

600 W

230 V (187 to 253 V)

Air

N/A

4010

40.680 MHz

1000 W

 

 

 

4020, 200 V

2000 W

3 x 200 V (180 to 230 V)

 

 

 

4020, 400 V

3 x 400 V (360 to 440 V)

483 mm (W) x 552 mm (D) x 132 mm (H)

Water

For water tubing 10 mm O.D., 8 mm I.D.

4040, 200 V

 

4000 W

3 x 200 V (180 to 230 V)

19" (W) x' 21.7" (D) x 5.2" (H)

4040, 400 V

 

3 x 400 V (360 to 440 V)

 

 


Doawload catalogue: 

Condition: Availibale

Contact to have the best cost: +84(0) 83 833 1313




0833831313