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CONTROL AND SUPERIOR FILM QUALITY

CONTROL AND SUPERIOR FILM QUALITY
CONTROL AND SUPERIOR FILM QUALITY

A New Level of Precision and Productivity for Cathodic Arc Processes The Solvix® by AE® arc-bias solution brings a new level of precision and productivity to cathodic arc processes. Powerful arc discharges, rapid vaporization of target material, and high-energy ions make cathodic arc deposition both powerful and potentially unstable. Available at a range of current levels up to 400 A, Solvix by AE arc supplies deliver excellent plasma ionization, ion energy, and throughput — with remarkable power and process control. Solvix by AE bias supplies add an even greater degree of control over film properties, for remarkably hard, dense, durable, adherent films.
Model: SOLVIX ARC AND BIAS SERIES
Nhà sản xuất: Advancedenergy

Product Highlights Applications

 Power and process control

 Better film density and adhesion

 Reduced target damage

 Proven reliability

 Reduced substrate damage and better yield

 Adaptability to a wide range of process requirements

 High throughput

 Efficient installation and service

 DC and pulsed-DC units

 Current, power, and voltage regulation modes

 Flexible architecture

 Air cooling

 Multiple units configurable for high-power requirements

 High-performance DSP regulator

Cathodic arc deposition of functional,

decorative, and hard coatings, including:

 TiN

 TiCN

 ALTiN

 ALCrSiN

 TiB2

 CrN

Product Specifications 

Solvix by AE Arc Power Supplies
Electrical
Output Power  0 to 60 A  0 to 100 A  0 to 210 A  0 to 400 A
Output Power  3 kW  6 kW  12 kW
Frequency Range  1 to 200 Hz (1 Hz increments)
Open-Load Voltage  100 VDC  60 VDC
Regulation Modes  Current (power and voltage)
Power Accuracy  < 1%
Repeatability  < 0.5%
Pulse Duty Cycle  1 to 99%
Input Voltage  400 to 480 VAC, 3 Φ, 50/60Hz
Physical
Dimensions  17.8 cm (H) x 48.4 cm (W) x 62.0 cm (D)
7" (H) x 19.1" (W) x 24.4" (D)
Weight  31.5 kg (69.4 lb)
Cooling  Air
I/O Control
Analog  Software customized: 4 digital input, 4 digital output; 3 analog input, 2 analog output
Digital  Standard: RS-232
Available: RS-485, Profibus, Ethernet

 

Solvix by AE Arc Power Supplies
Electrical
Output Power  0 to 60 A  0 to 100 A  0 to 210 A  0 to 400 A
Output Power  3 kW  6 kW  12 kW
Frequency Range  1 to 200 Hz (1 Hz increments)
Open-Load Voltage  100 VDC  60 VDC
Regulation Modes  Current (power and voltage)
Power Accuracy  < 1%
Repeatability  < 0.5%
Pulse Duty Cycle  1 to 99%
Input Voltage  400 to 480 VAC, 3 Φ, 50/60Hz
Physical
Dimensions  17.8 cm (H) x 48.4 cm (W) x 62.0 cm (D)
7" (H) x 19.1" (W) x 24.4" (D)
Weight  31.5 kg (69.4 lb)
Cooling  Air
I/O Control
Analog  Software customized: 4 digital input, 4 digital output; 3 analog input, 2 analog output
Digital  Standard: RS-232
Available: RS-485, Profibus, Ethernet



0833831313