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XSTREAM REMOTE PLASMA SOURCE

XSTREAM REMOTE PLASMA SOURCE
XSTREAM REMOTE PLASMA SOURCE

The high-efficiency Xstream® platform, mounted outside the process chamber, generates neutral, reactive species from stable feed gases for the purposes of surface modification, chamber cleaning, thin-film etch, and plasma-assisted deposition. The Xstream platform integrates a remote plasma source, a 8 kW or 10 kW high-efficiency power supply, and a patented, solid-state active matching network™ that accommodates the widest impedance operating range commercially available in a chamber clean source. The Xstream platform gives process engineers unsurpassed flexibility in their reactive-gas processes, thus improving system throughput and optimizing the use of expensive resources.
Model: XSTREAM REMOTE PLASMA
Nhà sản xuất: Advancedenergy

BENEFITS
Optimizes the use of expensive resources
Offers the widest impedance operating range
commercially available
Operates seamlessly with a broad range of chemistries,
including existing PFC/O2 in-situ chamber clean recipes
Increases process performance, flexibility, and throughput
Enables streamlined retrofits for both in-situ and remote
CVD chamber cleans
Leverages previously patented AE® active matching
network™ technology
FEATURES
Solid-state, on-board active matching network
Fully integrated, high-efficiency, 400 kHz power supply
Optional Virtual Front Panel (VFP) intuitive, real-time,
software-based user interface
Low water consumption
Hard-anodized, low-particulate, corrosive-compatible
metallic source chamber
Advanced monitoring circuitry that measures actual power
delivered to the plasma
Readback signals for system integration and monitoring 

8 kW unit 10 kW unit
General Operating Parameters
Plasma Power Range 1000 to 8000 W 1000 to 10000 W
Process Applications Remote delivery of gases for CVD chamber cleaning, reactive-etching processes,
and reactive-deposition processes
Ignition 100 mTorr to 4.00 Torr, Ar < 1 slm
Chemical Compatibility Intended for use with selected gases, such as Ar, O2, H2, N2, F2, H2O, NF3, or O2: CxFy.
Note: Other gases and chemistries may be selected; contact AE Technical Support for suitable
combinations.
NF3 Operating Specifications
Flow Range Up to 6 slm at 12 Torr Up to 8 slm at 6 Torr
Pressure Range Up to 15 Torr at 1 slm Up to 15 Torr at 1 slm
NF3 Dissociation Efficiency > 98% dissociation at 6 slm and 7 Torr
at 8 kW as measured by FTIR
> 98% dissociation at 8 slm and 6 Torr
at 10 kW as measured by FTIR
Operating Specifications
Duty Cycle Continuous operation within specified operating range
Cooling Flow Rate 2 gpm @ 8 kW and 25°C (77°F) input water
Ambient Air +5 to +40°C (+41 to +104°F)
AC Electrical Requirements
Input Voltage 200/208 VAC ±10% (180 to 229 VAC), no neutral, 3 Φ with ground (Φ insensitive)
Line Frequency 50/60 Hz nominal; 47 to 63 Hz range
Input Current 27 A nominal, 31 A max per Φ 30 A nominal, 35 A max per Φ
Weight 28.7 kg (63.2 lb)
Demonstrated Reliability > 450,000 h MTBF

 

8 kW unit 10 kW unit
General Operating Parameters
Plasma Power Range 1000 to 8000 W 1000 to 10000 W
Process Applications Remote delivery of gases for CVD chamber cleaning, reactive-etching processes,
and reactive-deposition processes
Ignition 100 mTorr to 4.00 Torr, Ar < 1 slm
Chemical Compatibility Intended for use with selected gases, such as Ar, O2, H2, N2, F2, H2O, NF3, or O2: CxFy.
Note: Other gases and chemistries may be selected; contact AE Technical Support for suitable
combinations.
NF3 Operating Specifications
Flow Range Up to 6 slm at 12 Torr Up to 8 slm at 6 Torr
Pressure Range Up to 15 Torr at 1 slm Up to 15 Torr at 1 slm
NF3 Dissociation Efficiency > 98% dissociation at 6 slm and 7 Torr
at 8 kW as measured by FTIR
> 98% dissociation at 8 slm and 6 Torr
at 10 kW as measured by FTIR
Operating Specifications
Duty Cycle Continuous operation within specified operating range
Cooling Flow Rate 2 gpm @ 8 kW and 25°C (77°F) input water
Ambient Air +5 to +40°C (+41 to +104°F)
AC Electrical Requirements
Input Voltage 200/208 VAC ±10% (180 to 229 VAC), no neutral, 3 Φ with ground (Φ insensitive)
Line Frequency 50/60 Hz nominal; 47 to 63 Hz range
Input Current 27 A nominal, 31 A max per Φ 30 A nominal, 35 A max per Φ
Weight 28.7 kg (63.2 lb)
Demonstrated Reliability > 450,000 h MTBF




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